MEMS for characterization of thermal conductivity in thin films and two-dimensional materials

Jiang, Felix; Ryu, M.; Morikawa, J.; Pachauri, Vivek; Ingebrandt, Sven; Vu, Xuan Thang

Berlin : VDE Verlag (2021, 2022)
Contribution to a book, Contribution to a conference proceedings

In: MikroSystemTechnik Kongress 2021 : Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte für zukunftsfähige Märkte : 08.-10. November 2021, Stuttgart-Ludwigsburg
Page(s)/Article-Nr.: 278-281

Institutions

  • Chair of Materials in Electrical Engineering I and Institute of Materials in Electrical Engineering [611510]
  • Chair of Micro- and Nanosystems and Institute of Materials in Electrical Engineering [612510]

Identifier

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